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发明名称
VERFAHREN ZUM HERSTELLEN EINER MONOKRISTALLINEN HALBLEITERSCHICHT.
摘要
申请公布号
DE3779672(T2)
申请公布日期
1993.01.28
申请号
DE19873779672T
申请日期
1987.03.05
申请人
IIZUKA, KOZO, TOKIO/TOKYO, JP
发明人
SUGAHARA, KAZUYUKI C/O MITSUBISHI DENKI K.K.;NISHIMURA, TADASHI C/O MITSUBISHI DENKI K.K.;KUSUNOKI, SHIGERU C/O MITSUBISHI DENKI K.K.;INOUE, YASUO C/O MITSUBISHI DENKI K.K., ITAMI-SHI HYOGO, JP
分类号
H01L21/20;H01L21/268;H01L21/822;H01L29/04;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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