System for inspecting electrically conductive pattern.

摘要

Electrically conductive patterns such as antenna patterns (P) on window glass (Q) are inspected for a wire break or short circuit. The impedances between an electrically conductive pattern (P) and an electrically conductive layer (Q) on an inspective table (3) are measured at predetermined frequencies, or the levels of signals reflected from the electrically conductive pattern are measured at predetermined frequencies. A decision unit (5) determines whether the electrically conductive pattern is acceptable or not based on the frequency characteristics of the electrically conductive pattern and the reference frequency characteristics of a reference electrically conductive pattern. <IMAGE>