| 摘要 |
PURPOSE:To reduce coercive force and improve soft magnetic property, by a method wherein the surface of a soft magnetic thin film is oxidized so as to form a layer deteriorated in soft magnetic property, and soft magnetic films clamping the oxide layer are coupled weakly. CONSTITUTION:Oxide layer by oxidizing surface of a soft magnetic thin film layer is used as a non-magnetic thin film interposed between soft magnetic thin film layers. For example, a soft magnetic thin film 3 of permalloy or the like is applied by sputtering to a substrate 2 within a vacuum chamber 1. Oxygen gas 4 is introduced in the vacuum chamber 1, and portion holding the substrate 2 is used as an electrode 5 and high-frequency discharge is performed. During this process, oxygen in plasma state is bombarded onto the surface of the soft magnetic thin film and oxidation is forcibly performed thereby oxide layer 6 is formed. The oxygen gas is removed and then a soft magnetic thin film 7 is again applied by sputtering. Above-mentioned process is repeated thereby multi- layer soft magnetic film is formed. |
