CLEANING METHOD FOR STAMPER

摘要

PURPOSE:To simply and inexpensively regenerate a stamper by allowing ultrasonic waves to act on the surface of the stamper while water is brought into contact with the surface of the stamper. CONSTITUTION:In cleaning the stamper fixed to a mold and used in order to transfer a predetermined shape to the surface of the resin received in the mold, ultrasonic waves are allowed to act on the surface of the stamper while water is brought into contact with the surface of the stamper. As washing water used in the cleaning, water containing calcium and magnesium in an amount of about 100ppm in total on a wt. basis is desirably used from the aspect of cleaning effect.