发明名称 METHOD AND APPARATUS FOR JUDGING BEARING OF SAMPLE IN X-RAY ANALYSIS
摘要 <p>PURPOSE:To judge the bearing of a sample without contaminating the surface of a sample regardless of the size of a cut part for specifying the analyzing part of the sample when the analyzing part is specified in the X-ray analysis of the sample. CONSTITUTION:At first, a plate-shaped sample 10 having a cut part 13 at the outer periphery is mounted on a sample stage 40. Then, the cut part 13 in the sample 10 is detected with a noncontact type sample detector provided in a fluorescence X-ray analyzing apparatus. An angle beta to the cut part 13 with respect to a base line R passing a center O2 of the sample stage 40 is calculated based on the detected result. Thus, the bearing of the sample 10 is judged.</p>
申请公布号 JPH0518912(A) 申请公布日期 1993.01.26
申请号 JP19910198754 申请日期 1991.07.12
申请人 RIGAKU DENKI KOGYO KK 发明人 SAKO YUKIO;KITADA MASATOKI;YAMAMOTO ETSUHISA
分类号 G01N23/223;H01L21/68 主分类号 G01N23/223
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