TREATMENT OF NITROGEN TRIFLUORIDE-CONTAINING EXHAUST GAS

摘要

PURPOSE:To improve the defect of a nitrogen trifluoride (NF3)containing exhaust gas treatment method provided heretofore and to simply and efficiently treat NF3-containing exhaust gas to reduce the concn. of NH3 to a level not generating a problem from the aspect of air pollution or working environment. CONSTITUTION:Exhaust gas containing nitrogen trifluoride (NF3) is brought into contact with a mixture consisting of activated carbon and metal oxide at 200-600 deg.C to be reacted therewith to be made harmless.