发明名称 |
Method for determining the presence of thin insulating films |
摘要 |
There is provided a method for determining the presence of an insulating film on the surface of an electrically conductive material. In this method, an electrically conductive probe is brought into contact with the surface of a specimen, and a voltage is applied between the probe and the surface of the specimen. A tunneling current which flows through the probe is detected and amplified, while controlling the distance between the probe and the surface of the specimen to ensure a substantially constant tunneling current.
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申请公布号 |
US5182452(A) |
申请公布日期 |
1993.01.26 |
申请号 |
US19910776852 |
申请日期 |
1991.10.15 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD. |
发明人 |
NIWA, MASAAKI;OKADA, SHOZO |
分类号 |
G01Q60/10;H01J37/00;H01J37/30 |
主分类号 |
G01Q60/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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