| 摘要 |
PURPOSE:To achieve high accuracy in detection of defects by marking a high luminance part by binary coding, providing a means for inspecting the circularity of a pattern, and detecting high-luminance black spots and the like such as attached dust in addition to the deformation and dent of a container based on the results of the inspections with a defect inspecting means and a circularity inspecting means. CONSTITUTION:When dust such as 111 is attached to the port part of a container 102, the dust is detected as the circular cut part in a port-part high luminance part 103. When a large dent 112 is present at the side surface part. The dent can be detected as the distortion of a bottom-part high luminance part 104. In general, the dent is different from the dust attachment, and the difference in contrasts is small. Therefore, the circularity inspection of the bottom-part high luminance 104 is effective. The number of windows can be decreased by conducting the circularity inspection at the outer surface within the high luminance part and the inspection of the black point and a white points with a defect detecting circuit in parallel. |
