| 摘要 |
PURPOSE:To obtain an etching solution with which a cured polyimide resin can be etched safely at a high rate with easiness of handling by mixing water with an aprotic organic solvent compatible with water, a protonic organic solvent compatible with water, and a basic compound. CONSTITUTION:The title solution is obtained by mixing the following four essential ingredients: water, an aprotic organic solvent compatible with water (e.g. methyl ethyl ketone), a protonic organic solvent compatible with water (e.g. methanol), and a basic compound (e.g. sodium hydroxide). By the use of this etching solution which can be handled safely, a completely cured polyimide resin can be etched at an extremely high rate. |
