| 摘要 |
PURPOSE:To improve the machining accuracy and prolong the service life of a cutting tool such as a grinder in cutting a groove into a workpiece and attaining the mirror surface finish thereof to the required high precision as in the manufacture of a magnetic head. CONSTITUTION:In a rotary grinding machine, for example, to cut a groove into a workpiece W where the workpiece W fixed on a slide table 14 freely slidable on a bed 13 is ground with a grinder 3 fitted to one end of an air spindle rotor shaft 1 kept within a housing 2 and capable of rotating via a rotor 4 and a stator 5, non-contact displacement sensors 16a and 16b are respectively laid on the aftward side of a motor rear cover 15 fitted to the rear end of the housing 2 and the aftward side of the housing 2. These sensors 16a and 16b detect the rear and side displacement of a spindle tail section due to the rotating vibration of the shaft 1. In addition, the dynamic balance of the shaft 1 is kept on the basis of detected displacement. |
