SURFACE ANALYZING APPARATUS

摘要

PURPOSE:To carry out component analysis of a specimen and obtain an enlarged image of the surface of the specimen simultaneously by radiating electron beam to the surface of the specimen and detecting the x-ray and secondary electron beam emitted by excitation of the surface of the specimen. CONSTITUTION:Electron beam is struck against the surface of a specimen at incidence angle thetag (<=4 deg.) by an electron gun 2. Then, the surface of the specimen is excited and emits characteristic x-ray and secondary electron beam. The x-ray is detected at the prescribed x-ray taking out angle thetat (<=4 deg.) to the surface of the specimen by an energy dispersion-type x-ray detector 3. The x-ray detection sensitivity is remarkably improved at the x-ray whole reflection angle (<=4 deg.). The data of element analysis of the specimen's surface condition and the atomic arrangement structure of the surface is obtained by this sensitive detection. Also, since secondary electron beam is generated from the surface of the specimen excited by the electron beam, an enlarged image of the specimen is observed by an electron beam detector 4.