VACUUM TRANSFER TREATMENT DEVICE,申请号JP19910189432-传众专利搜索

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发明名称	VACUUM TRANSFER TREATMENT DEVICE
摘要
申请公布号	JPH0513549(A)	申请公布日期	1993.01.22
申请号	JP19910189432	申请日期	1991.07.04
申请人	TEL VARIAN LTD	发明人	KATO SUSUMU
分类号	H01L21/677;H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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