FILM CARRIER,申请号JP19910166726-传众专利搜索

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发明名称	FILM CARRIER
摘要
申请公布号	JPH0513509(A)	申请公布日期	1993.01.22
申请号	JP19910166726	申请日期	1991.07.08
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	OONAKADA SATORU;KABESHITA AKIRA;KANAYAMA SHINJI
分类号	H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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