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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0513433(A)
申请公布日期
1993.01.22
申请号
JP19910165361
申请日期
1991.07.05
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
HARUYAMA MASAMITSU;IIJIMA TETSUO;OTAKA SHIGEO
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
代理机构
代理人
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地址
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