| 摘要 |
PURPOSE:To obtain the positive type photosensitive composition high in sensitivity and superior in resolution. CONSTITUTION:This composition contains a polymer compound having repeating units each having 1, 2-naphthoquinone-2-diazido-4-or/and-5-sulfonyl group represented by formula I in an amount of at least 1mol%. In formula I, D is 1,2-naphthoquinon-2-diazido-4-yl group or 1, 2-napluthoquinon-2-diazido-5-yl; A is H or alkyl; B is a simple bond, a divalent aromatic bonding group, -CO-O-R<1>-, or -CO-NR<2>-R<1>-; R<1> is a divalent aliphatic or aromatic hydrocarbon group; R<2> is H, alkyl, aryl, or aralkyl; and n is an integer of >=1. |
