发明名称 ACTIVE MATRIX SUBSTRATE
摘要 <p>PURPOSE:To improve a liquid crystal display device using an active matrix substrate as a driving element for the porpose of limiting an off current to a lower one for higher display performance, said device being representative of a flat panel display wherein a TFT is most expected as an active element upon malting the device as a large sized screen and making the same as highly fine one. CONSTITUTION:The thickness of a gate insulating film 13 of a thin film transistor is made thicker than the thickness of a gate insulating film 13 of a channel part at the center of the same in the vicinity of a source electrode 16 and a drain electrode 17.</p>
申请公布号 JPH0513765(A) 申请公布日期 1993.01.22
申请号 JP19910183352 申请日期 1991.06.28
申请人 ASAHI GLASS CO LTD 发明人 TADA MASAHIKO;ENDO YUKIO
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L27/12;H01L29/78;H01L29/786 主分类号 G02F1/136
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