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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0513543(A)
申请公布日期
1993.01.22
申请号
JP19910166703
申请日期
1991.07.08
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
MIYATAKE SHINICHI
分类号
H01L21/66;G05F1/56;H01L21/822;H01L27/04
主分类号
H01L21/66
代理机构
代理人
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