| 摘要 |
<p>PURPOSE:To provide a probe device for measuring the electric characteristic or circuit characteristic of a semiconductor device formed on a semiconductor substrate (hereinafter called 'wafer') in the state of a wafer. CONSTITUTION:This prove device is provided with a probe card supporting table 101, wafer supporting table 103 which is installed in a horizontal position against the table 101, wafer supporting table rotating source 109 which rotates the table 103 in a horizontal plane against the table 101, and controller 111 which controls the driving source 109 by using an electric signal. Therefore, a process control monitor (PCM) placed in an arbitrary direction at an arbitrary position in one chip can be measured under a fully automated condition.</p> |
