MANUFACTURE OF THIN FILM TRANSISTOR,申请号JP19910163032-传众专利搜索

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发明名称	MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号	JPH0513439(A)	申请公布日期	1993.01.22
申请号	JP19910163032	申请日期	1991.07.03
申请人	SEIKO EPSON CORP	发明人	KOIKE HIDEKI;ISHIGURO HIDETO
分类号	H01L21/265;H01L21/336;H01L29/78;H01L29/786	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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