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发明名称
MANUFACTURE OF SEMICONDUCTOR IC DEVICE
摘要
申请公布号
JPH0513595(A)
申请公布日期
1993.01.22
申请号
JP19910042539
申请日期
1991.02.13
申请人
SONY CORP
发明人
TAKEDA MINORU
分类号
H01L21/28;H01L21/3205;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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