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发明名称
WAFER TRANSFER DEVICE
摘要
申请公布号
JPH0513548(A)
申请公布日期
1993.01.22
申请号
JP19910188341
申请日期
1991.07.03
申请人
TOKYO ELECTRON SAGAMI LTD
发明人
WADA ATSUSHI
分类号
H01L21/677;H01L21/22;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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