| 摘要 |
PURPOSE:To prepare a result display chart which can earlier grasp a working situation, etc., by collecting the respective pieces of information of the number of works, a work date/time and a process from a terminal device provided for respective facilities and graphically displaying the number of product works and a target performance at respective dates/times on one screen. CONSTITUTION:A terminal device 2 inputs information on the facilities 1a to 1n respectively production-process a semiconductor equipment. The host computer 3 collects the information from the terminal device 2. A data base processes data obtained by the host computer 3 and prepares the result chart. Then, a graph display terminal 4 plots the result display chart. Thus, the result chart which can grasp a production management situation earlier and which can take a measure corresponding to it. |
