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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0513585(A)
申请公布日期
1993.01.22
申请号
JP19910158916
申请日期
1991.06.28
申请人
SUMITOMO ELECTRIC IND LTD
发明人
HASEGAWA YOSHIMICHI
分类号
H01L21/768;H01L23/522
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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