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发明名称
摘要
申请公布号
JPH055383(B2)
申请公布日期
1993.01.22
申请号
JP19880116697
申请日期
1988.05.13
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
ASAKURA KOICHI;MIWA JUNICHI
分类号
H01L29/74;H01L29/747
主分类号
H01L29/74
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