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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0513570(A)
申请公布日期
1993.01.22
申请号
JP19910164864
申请日期
1991.07.05
申请人
NEC CORP
发明人
MATSUNAGA TAKAKO
分类号
H01L21/02;H01L21/301;H01L21/78
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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