FORMATION OF CONTACT HOLE IN THIN FILM TRANSISTOR,申请号JP19910165852-传众专利搜索

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发明名称	FORMATION OF CONTACT HOLE IN THIN FILM TRANSISTOR
摘要
申请公布号	JPH0513762(A)	申请公布日期	1993.01.22
申请号	JP19910165852	申请日期	1991.07.05
申请人	SHARP CORP	发明人	UEDA TORU;ODA TSUNEO
分类号	H01L21/306;H01L21/3205;H01L21/336;H01L21/768;H01L29/78;H01L29/786	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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