DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR,申请号JP19910165465-传众专利搜索

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发明名称	DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号	JPH0513636(A)	申请公布日期	1993.01.22
申请号	JP19910165465	申请日期	1991.07.05
申请人	MITSUBISHI ELECTRIC CORP	发明人	OGURI YOSHIHISA
分类号	B23D15/00;H01L23/50	主分类号	B23D15/00
代理机构		代理人
主权项
地址

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