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经营范围
发明名称
SEMICONDUCTOR CHIP TESTER
摘要
申请公布号
JPH0513521(A)
申请公布日期
1993.01.22
申请号
JP19910165722
申请日期
1991.07.05
申请人
TOKYO SEIMITSU CO LTD
发明人
MIZUMURA TSUTOMU
分类号
G01R1/073;G01R31/26;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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