METHOD FOR PRODUCING A TITANIUM COMPOUND COATING

摘要

A titanium (Ti) compound coating is formed with the deposition device, which comprises evaporating sources (4,4'), an ionized electrode (6) and a filament (5) set in a vacuum chamer (2), and the ionized electrode (6) is arrayed opposite to the filament (5) on the evaporation sources (4,4'). Its coating method is composed of (A) chrging a grain shaped titanium in a boat, which uses graphite or tungsten boat as evaporting sources, (B) inducing arc discharge more than 10 A into the ionized electrode (6) without gas introduction, (C) introducing a reactive gas containing titanium compound by providing a gas introducing hole (9) accompanied with leak valve (7) near by the evaporating sources (4,4'), (D) controlling the partial pressure of the introduced component gas by the leak valve (7) and main valve (8), and (E) reactive ion plating in the controlled pressure of the reactive gas.