发明名称 METHOD FOR MAKING OF MICROWARE HYBRID INTEGRATED CIRCUITS WITH THIN- LAYER RESISTOR
摘要 The method is applied in radioelectronics, instrument production and telecommunications equipment. It is simple and enhances yield. Following the method, on the facial part of a dielectric substrate under vacuum are consecutively deposited thin resistive, adhesive, conducting and protective layers, while its rear part - thin adhesive, conducting and protective layers. Through two consecutive photolithographies and electrochemical deposition of a conducting, barrier and anti-corrosive layer, are formed thin-layer resistors, contacting yards and micro-band elements. After thermal treatment and adjustment of the thin-layer resistors, follows the positioning of discrete elements.
申请公布号 BG51028(A1) 申请公布日期 1993.01.15
申请号 BG19900093358 申请日期 1990.12.03
申请人 MINISTERSTVO NA VATRESHNITE RABOTI 发明人 SIMEONOVA, SVETLA V.;JAKIMOV, TIKHOMIR N.
分类号 H01L21/84;H01L27/12;(IPC1-7):H01L27/12 主分类号 H01L21/84
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