| 摘要 |
<p>PURPOSE:To simplify control of each wafer and carry wafers in a sheet between devices by making a wafer carrier a single plate and housing one wafer in one wafer carrier. CONSTITUTION:On a side of a plate 1, a stopper 2 is provided along an outer periphery of a wafer and a wafer support 4 is provided inside. In addition by providing a groove 6 to be engaged with the stopper 2 on a rear face of the plate 1, wafer carriers can be stacked. Since the wafer carriers are marked with identification labels 3a, 3b, identification of each of the wafers is easy. Also carrying wafers between devices can be done in a sheet as well as a storage space for storing the wafers can be reduced.</p> |
