DRY ETCHING APPARATUS,申请号JP19910157970-传众专利搜索

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发明名称	DRY ETCHING APPARATUS
摘要
申请公布号	JPH056871(A)	申请公布日期	1993.01.14
申请号	JP19910157970	申请日期	1991.06.28
申请人	NEC KANSAI LTD	发明人	NAKAMURA YASUSHI
分类号	C23F4/00;H01L21/302;H01L21/3065;H05H1/46	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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