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发明名称
SURFACE TREATMENT METHOD
摘要
申请公布号
JPH056880(A)
申请公布日期
1993.01.14
申请号
JP19910157058
申请日期
1991.06.27
申请人
TOSHIBA CORP
发明人
NISHINO HIROTAKE;HAYASAKA NOBUO;OKANO HARUO
分类号
H01L21/28;H01L21/302;H01L21/304;H01L21/3065
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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