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发明名称
METHOD OF FAST ETCHING
摘要
申请公布号
JPH055192(A)
申请公布日期
1993.01.14
申请号
JP19910153577
申请日期
1991.06.26
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
IKETANI SHINICHI;KODERA KOHEI
分类号
C23F1/00;C23F1/02;H05K3/06
主分类号
C23F1/00
代理机构
代理人
主权项
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