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发明名称
APPARATUS FOR PRODUCING SILICON SINGLE CRYSTAL
摘要
申请公布号
JPH054888(A)
申请公布日期
1993.01.14
申请号
JP19910154542
申请日期
1991.06.26
申请人
NKK CORP
发明人
NAKAHAMA YASUMITSU;SUZUKI MAKOTO;SHIMA YOSHINOBU;KAMIO HIROSHI
分类号
C30B15/00;C30B29/06
主分类号
C30B15/00
代理机构
代理人
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