| 摘要 |
<p>PURPOSE: To provide an optimum signal which is exactly corresponding to the lateral position of mask on a recording plane by practically moving in parallel a silicon wafer, according to the measured values of two detectors processed by a microprocessor for preparing an arrange signal corresponding to a piezoelectric device. CONSTITUTION: A wafer is quantitatively moved little by little by a piezoelectric device 26 or a stepping motor in a direction practically parallel to a hologram lattice direction within the range smaller than a lattice interval and for achieving resist adjustment in that direction. After the end of a movement, it is read by detectors 22 and 24 and stored in the memory of a microprocessor 28. When two lattices are properly put in order, because of symmetricity, the strength of two dimensions of two detectors becomes equal. Therefore, two read values stored in the microprocessor 28 are substracted, and an arranging position is determined. Thus, the lateral position of mask on the recording plane can be provided exactly.</p> |
