ANORDNUNG UND VERFAHREN ZUM KONTAKTIEREN VON LEITENDEN SCHICHTEN

摘要

An indirectly conductive connection between a lower conducting layer (3) and an upper conducting layer (4) which is covered by a second insulating layer is obtained by etching a contact hole (11) in the insulating layer which reveals both a part of the lower (3) and the upper conductive layer (4). The contact hole is filled with a conductive material, especially tungsten, so that the horizontal surface (13) of the insulating layer is not covered by the conductive material.