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发明名称
摘要
申请公布号
JPH052937(B2)
申请公布日期
1993.01.13
申请号
JP19870098599
申请日期
1987.04.23
申请人
SHINETSU HANDOTAI KK
发明人
MORI YOSHUKI;NAKASUGI SUNAO;ABE TAKAO
分类号
G01N25/72;G01N15/00;H01L21/22
主分类号
G01N25/72
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