发明名称 METHOD AND APPARATUS FOR FORMING A LIGHT BEAM
摘要 Technology of forming a fine light beam overcoming the limit caused by the wavelength of light and characteristics of the objective lens. A beam distribution shifter 4 having two light transmission regions is disposed between a source 1 of light and an objective lens 5, a phase-shifting means is provided on one of the two light transmission regions to divine the light passing through the beam distribution shifter 4 into two light fluxes L1 and L2 having phases opposite to each other, and the two light fluxes L1 and L2 are focused through the objective lens 5 to form a fine light beam overcoming the limit caused by the wavelength of light and characteristics of the objective lens 5. <IMAGE>
申请公布号 EP0492844(A3) 申请公布日期 1993.01.13
申请号 EP19910311282 申请日期 1991.12.04
申请人 HITACHI, LTD. 发明人 OKAMOTO, YOSHIHIKO
分类号 C23C16/48;G01B11/06;G01B11/28;G01N21/88;G01N21/94;G01N21/95;G02B21/00;G02B27/58;G11B7/125;G11B7/135;G11B7/26;H01L21/027;(IPC1-7):G02B27/00;H01L21/70 主分类号 C23C16/48
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