发明名称 Method of shaping superconducting oxide material
摘要 A method of forming a superconducting oxide material comprises the steps of forming of a superconducting oxide material into a thin film on a film-forming surface portion, creating a plasma to form an activated oxygen atmosphere, subjecting the thin film to a magnetic field through the thickness of the thin film, thereby injecting the activated oxygen into the thin film so that crystals of the superconducting oxide material are aligned parallel or perpendicular to the film-forming surface portion.
申请公布号 US5179073(A) 申请公布日期 1993.01.12
申请号 US19910780788 申请日期 1991.10.23
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI, SHUNPEI
分类号 H01L39/24 主分类号 H01L39/24
代理机构 代理人
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