发明名称 VARIABLE TEMPERATURE SCANNING TUNNELING MICROSCOPE
摘要 A Variable Temperature Scanning Tunneling Microsope A themally compensated tube scanner scanning tunneling microscope utilizes two concentric piezoelectric tubes, one for scanning and one for coarse translation as well as fine adjustment of sample position while in tunneling range. There are no mechanical components such as springs, levers, gears, or stepper motors which are known to result in considerable vibration sensitivity and thermal drift. Consequently, the standard mode of atomic resolution operation for the device is without vibration isolation and with a thermal drift of less than 1 angstrom per hour.
申请公布号 CA1312681(C) 申请公布日期 1993.01.12
申请号 CA19890614658 申请日期 1989.09.29
申请人 BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS (THE) 发明人 LYDING, JOSEPH W.
分类号 H01J37/26;H01J37/28 主分类号 H01J37/26
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