SEMICONDUCTOR PROTECTIVE FILM FORMING METHOD AND DEVICE,申请号JP19910151561-传众专利搜索

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发明名称	SEMICONDUCTOR PROTECTIVE FILM FORMING METHOD AND DEVICE
摘要
申请公布号	JPH053188(A)	申请公布日期	1993.01.08
申请号	JP19910151561	申请日期	1991.06.24
申请人	KAWASAKI STEEL CORP	发明人	ISHII KOICHI
分类号	H01L21/312;H01L23/29;H01L23/31	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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