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经营范围
发明名称
CLEANING METHOD
摘要
申请公布号
JPH053186(A)
申请公布日期
1993.01.08
申请号
JP19910180238
申请日期
1991.06.24
申请人
SONY CORP
发明人
INAGAKI YASUSHI
分类号
H01L21/304;B08B3/10;B08B3/12
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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