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发明名称
MANUFACTURE OF MICRO-PUMP AND MICRO-VALVE
摘要
申请公布号
JPH051669(A)
申请公布日期
1993.01.08
申请号
JP19910150306
申请日期
1991.06.21
申请人
SEIKO EPSON CORP
发明人
ARAKAWA KATSUHARU
分类号
F04B9/00;B81B3/00;B81C1/00;F04B43/04
主分类号
F04B9/00
代理机构
代理人
主权项
地址
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