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发明名称
METHOD OF DETECTING MISALIGNMENT BETWEEN THROUGH-HOLE AND UPPER LAYER WIRING
摘要
申请公布号
JPH053237(A)
申请公布日期
1993.01.08
申请号
JP19910153562
申请日期
1991.06.25
申请人
OKI ELECTRIC IND CO LTD
发明人
FUSHIMI KIMIHISA
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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