摘要 |
PURPOSE:To aim at the compatibility of the stable fixation of a device and the excellent liquid seal with a compact form. CONSTITUTION:The peripheral verge of a rubber film 3 forming the chamber wall of a liquid chamber B is adhered to the peripheral lower surface of a partitioning plate 4 for partitioning liquid chambers A, B, and a flange 51 of the verge of an opening is adhered to the lower surface of the peripheral verge of the rubber film 3 at a constant length. A bottom plate 6 is formed so that depth of caulking thereof is made shallow to secure the sufficient diameter 12 of a flat part. A device is fixed stably by securing the sufficient diameter of the flat part of the bottom plate, which is in contact with a base body. Though the depth 11 of the caulking is shallow, since the flange 51 of the verge of the opening of a middle plate is adhered to the peripheral verge of the rubber film 3 at a constant length L, liquid tightness in this part is maintained well. |