GRATING INTERFERENCE TYPE DISPLACEMENT DETECTING DEVICE,申请号JP19910183087-传众专利搜索

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发明名称	GRATING INTERFERENCE TYPE DISPLACEMENT DETECTING DEVICE
摘要
申请公布号	JPH051925(A)	申请公布日期	1993.01.08
申请号	JP19910183087	申请日期	1991.06.26
申请人	MITSUTOYO CORP	发明人	TOMITANI MASAKI;SATOU SOUICHI;ITABASHI TATSUO
分类号	G01B11/00;G01D5/38	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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