APPARATUS FOR MAKING PURE WATER

摘要

PURPOSE:To easily and efficiently prepare high purity water at a low cost. CONSTITUTION:An ultraviolet irradiation device 1 irradiating water to be treated with ultraviolet rays to oxidize org. matter to an org. acid, an anion exchange device 2 treating the treated water containing the org. acid from the ultraviolet irradiation device 1 and a mixed bed type ion exchange device 3 removing the residual ionic substance from the anion exchange device 2 are mounted. High purity water extremely low in TOC concn. can be prepared within a short time. The excessive consumption of power due to the excessive oxidation of org. matter is avoided and the quantity of electricity required in ultraviolet oxidation can be reduced. The regeneration frequency of the mixed bed type ion exchange device can be also reduced to a large extent. Process control becomes easy and the running cost of the apparatus can be reduced to a large extent and the apparatus can also be miniaturized.