| 摘要 |
PURPOSE:To improve the detecting sensitivity and accuracy of an angular velocity in the widthwise direction acting to a main body of a sensor by arranging a pair of heat wires in parallel in the widthwise direction of a gas flow passage of approximately rectangular cross section, and making the width of the gas flow passage to be specific times of the height. CONSTITUTION:A half hole to form a nozzle hole 3 and a half groove to form a gas flow passage 4 are etched in a lower groove semiconductor substrate 1 and an upper semiconductor substrate 2 of a main body of this sensor. The lower and upper semiconductor substrates are overlapped and bonded with each other to butt the respective half holes and half grooves, thereby obtaining the nozzle hole 3 and the gas flow passage 4 of approximately rectangular cross section. A pair of heat wires 51, 52 are formed by patterning in parallel to each other in the widthwise direction W of the gas flow passage 4 on a bridge part 6 all over the gas flow passage 4 at the side of the substrate 1. The width W of the gas flow passage 4 is set to be approximately five times or more of the height (d). Accordingly, gas flow travels more straight towards the pair of the heat wires 51, 52 and the detecting accuracy of the angular velocity acting in the right-and-left direction is consequently improved. |
