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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH051372(A)
申请公布日期
1993.01.08
申请号
JP19910153171
申请日期
1991.06.25
申请人
CANON INC
发明人
KOGANEI AKIO
分类号
C23C14/34;H01L21/203
主分类号
C23C14/34
代理机构
代理人
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地址
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